Advance Binary Mask

Manufacturing steps

-Exposure by e-beam or laser beam
-Post Exposure Bake
-Development
-CrOx/Cr Etching by dry/wet Etching Process
-Photoresist Stripping
 

Phase Shifting Mask

Phase-shift masks are photomask  that take advantage of the interference generated by Phase differences to improve image resolution in photolithography.  There exist alternating and attenuated phase shift masks

Manufacturing Steps

-Exposure by e-beam or laser beam
-Post Exposure Bake
-Development
-CrOx/Cr Etching by dry/wet Etching Process
-Photoresist Stripping
-PSM Layer Etching
-Second PR Coating/Patterning
-Removal of Cr & Pr Film 


Optical Proximity Correction (OPC)

(OPC) is a photolithography enhancement technique commonly used to compensate for image errors due to diffraction or process effects and employ to improve the quality of high-performance integrated circuit designs.

At Remarkable we are proud to provide OPC on photomask as per semiconductor manufacturers request.  


Technology

Photo-mask Manufacturing Process